Laser Based Focus Tracking Systems
The LAF sensors are designed to enable real time focus tracking for optical inspection equipment & industrial microscopes. The sensor are widely used in AOI systems for flat panel displays, electronics and semiconductors
Our technology enables focus tracking on:

Non Patterned Surfaces

Patterned surfaces with high contrast changes

Smallest structures with high magnification lenses

Unique Features:

Hybrid Laser/ Image Tracking

Multi Surface focus on sandwich substrates

Automated Setup

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