The LAF sensors are designed to enable real time focus tracking for optical inspection equipment & industrial microscopes. The sensor are widely used in AOI systems for flat panel displays, electronics and semiconductors
Our technology enables focus tracking on:
Non Patterned Surfaces
Patterned surfaces with high contrast changes
Smallest structures with high magnification lenses
Unique Features:
Hybrid Laser/ Image Tracking
Multi Surface focus on sandwich substrates
Automated Setup